顶点气体混合系统

对于定点使用精密气体混合的完整解决方案

The Apex Gas Mixing System, powered by Veeco’s production-proven Piezocon® Gas Concentration Sensor, allows manufacturers to reduce production costs by purchasing lower-cost, higher-concentration gases, then diluting at the point of use to immediately reduce gas purchase costs by as much as 60 percent. By using Piezocon to measure and control the mixture in real time, manufacturers eliminate the problems associated with constant flow mixers requiring wasted materials and constant scrubbing, furthering the already substantial cost savings. The stable output and precise control of gas concentration allows Apex to drive higher process tool up-time, eliminating the need to re-qualify after every gas cylinder change, reducing—and in some cases fully eliminating—system down-time due to routine cylinder changes. Apex drives real-time control, high precision and reproducibility and lowers cost of ownership for semiconductor manufacturers.

  • 优化用于需要低浓度,高精度且成本敏感的气体混合物的应用
  • 相比单独的气体钢瓶时10倍或更多改进的可重复性
  • 提高了系统的正常运行时间,消除旅游和重新资格,并减少测试时间
  • 立即多达60%降低购气成本
  • 无缝地与现有的已安装基础集成了用于宽范围的应用,包括太阳能,半导体和更
  • 使用Veeco的Piezocon气体浓度传感器用于PPM级控制的唯一气体混雷竞技官方网址合系统

对于实时控制,精度高,重复性好,更低的拥有成本,指望的Apex气体从Veeco的混合系统。雷竞技官方网址

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