Laser Processing Systems

Laser Processing Systems

Veeco delivers revolutionary Low-Cost-of-Ownership, HVM production-proven thermal annealing solutions at the most advanced technology nodes.

Making a Material Difference with Leading Laser Spike Annealing Technology

• Low Thermal Budget - improved critical device performance with diffusion-less super activation
• Elimination of Deactivation - Dual Beam Technology maintains device improvements with no dopant deactivation
• Reduction of Pattern Dependency – Within Die and Die-to-Die uniformity improvement
• Closed Loop Temperature Control – Reliable production with Real-Time process control & FDC